Acceleration factors for thin oxide breakdown

Journal of the Electrochemical Society

Volumn 132, Issue 8, 1985, Pages 1903-1908

  McPherson, J W ^a   Baglee, D A ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS - THIN FILMS; ELECTRIC BREAKDOWN;

ACCELERATION FACTORS; THIN OXIDE BREAKDOWN;

SILICA;

EID: 0022107573     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2114251     Document Type: Article

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