FLEXIBLE CIRCUIT AND SENSOR ARRAYS FABRICATED BY MONOLITHIC SILICON TECHNOLOGY.

IEEE Transactions on Electron Devices

Volumn ED-32, Issue 7, 1985, Pages 1202-1205

  Barth, Phillip W ^a   Bernard, Sharon Lea ^a   Angell, James B ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL ENGINEERING; THERMOMETERS - MANUFACTURE;

CHEMICAL MICROMACHINING; MONOLITHIC BATCH FABRICATION METHOD;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0022088596     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/t-ed.1985.22101     Document Type: Article

References (9)