|
Volumn 16, Issue 2-3, 1986, Pages 237-243
|
Ion beam modification of 6H/15R SiC crystals
a a a a b c |
Author keywords
[No Author keywords available]
|
Indexed keywords
CRYSTALS - RADIATION EFFECTS;
AMORPHIZATION;
CHANNELING;
RUTHERFORD BACKSCATTERING;
SILICON CARBIDE;
|
EID: 0022079565
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/0168-583X(86)90019-4 Document Type: Article |
Times cited : (91)
|
References (16)
|