SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 140, Issue 1, 1986, Pages 115-130

Thermal oxidation of transition metal silicides

(3) Jiang, H a Petersson, C S a Nicolet, M A b

a ROYAL INSTITUTE OF TECHNOLOGY (Sweden)

b CALIFORNIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES; THERMODYNAMIC PROPERTIES;

THERMAL OXIDATION; TRANSITION METAL SILICIDES;

TUNGSTEN COMPOUNDS;

EID: 0022078167 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(86)90166-5 Document Type: Article

Times cited : (79)

References (60)

1
- 0003659399
- J.M. Poate, K.N. Tu, J.W. Mayer, Wiley, New York
- (1978) Thin Films-Interdiffusion and Reactions
- Tu¹ Mayer²

2
- 0020864262
- N. Einspruch, G. Larrabee, Academic Press, New York, Chapter 6
- (1983) VLSI Electronics: Microstructure Science
- Nicolet¹ Lau²

3
- 0343188887
- (1980) Appl. Phys. Lett. , vol.37 , Issue.9 , pp. 824
- Chen¹ Houng² Hsiung³ Liu⁴

4
- 0342319397
- (1983) Appl. Phys. Lett. , vol.42 , Issue.4 , pp. 361
- d'Heurle¹ Irene² Ting³

5
- 0013017119
- (1982) Appl. Phys. Lett. , vol.40 , Issue.3 , pp. 263
- Chen¹ Liu² Chu³

6
- 0021663027
- Study of Oxidation of TiSi2Thin Film by XPS
- (1984) Japanese Journal of Applied Physics , vol.23 , Issue.12 , pp. 1560
- Yang¹ Iwakuro² Yagi³ Kuroda⁴ Nakamura⁵

7
- 0022115042
- (1985) Thin Solid Films , vol.131 , pp. 215
- Strydom¹ Lombaard² Pretorius³

8
- 3342933014
- 3rd Edition, Elsevier, New York
- (1984) Proc. Materials Research Society Annu. Meet., Boston, November 14–18, 1983 , vol.25 , pp. 51
- Lien¹ Bartur² Nicolet³

9
- 0000418119
- (1980) Appl. Phys. Lett. , vol.37 , Issue.7 , pp. 639
- Murarka¹ Chang²

10
- 0020751422
- (1983) J. Appl. Phys. , vol.54 , Issue.5 , pp. 2716
- Chow¹ Hamazeh² Steckl³

11
- 0019025558
- (1980) J. Appl. Phys. , vol.51 , Issue.6 , pp. 3241
- Murarka¹ Fraser² Lindenberber³ Sinha⁴

12
- 0020734462
- (1983) J. Appl. Phys. , vol.54 , Issue.4 , pp. 1849
- Baglin¹ d'Heurle² Petersson³

13
- 0020164291
- (1982) J. Appl. Phys. , vol.53 , Issue.7 , pp. 5342
- Razouk¹ Thomas² Pressacco³

14
- 0020946243
- (1983) J. Electrochem. Soc. , vol.130 , Issue.12 , pp. 2479
- DeBlaise¹ Razouk² Thomas³

15
- 0005240289
- (1982) Appl. Phys. Lett. , vol.41 , Issue.12 , pp. 1127
- Saraswat¹ Nowicki² Moulder³

16
- 0021194883
- (1984) J. Electron. Mater. , vol.13 , Issue.1 , pp. 81
- Bartur¹ Nicolet²

17
- 0043090472
- (1978) Appl. Phys. Lett. , vol.33 , pp. 826
- Inoue¹ Koike²

18
- 0019019903
- (1980) J. Electrochem. Soc. , vol.127 , Issue.5 , pp. 1128
- Mochizuki¹ Kashiwagi²

19
- 0020749946
- (1983) J. Appl. Phys. , vol.54 , Issue.5 , pp. 2711
- Wakita¹ Sigmon² Gibbons³

20
- 0021455321
- (1984) Appl. Phys. Lett. , vol.45 , Issue.2 , pp. 140
- Wakita¹ Sigmon² Gibbons³

21
- 0006417910
- (1978) Appl. Phys. Lett. , vol.33 , Issue.1 , pp. 76
- Zirinsky¹ Hammar² d'Heurle³ Baglin⁴

22
- 0346609000
- (1979) Appl. Phys. Lett. , vol.35 , pp. 529
- Mohammadi¹ Saraswat² Meindl³

23
- 0019071391
- (1980) Thin Solid Films , vol.72 , pp. 427
- Miller¹

24
- 0020849910
- Properties of low-pressure CVD tungsten silicide for MOS VLSI interconnections
- (1983) IEEE Transactions on Electron Devices , vol.30 , Issue.11 , pp. 1497
- Saraswat¹ Brors² Fair³ Monnig⁴ Beyers⁵

25
- 84918478170
- H. Jiang, C. S. Petersson and F. M. d'Heurle, unpublished results, 1985.

26
- 36549091925
- (1985) Appl. Phys. Lett. , vol.47 , Issue.11 , pp. 1170
- d'Heurle¹ Frampton² Irene³ Jiang⁴ Petersson⁵

27
- 0040801530
- (1980) Phys. Rev. B , vol.22 , Issue.4 , pp. 1885
- Pretorius¹ Strydom² Mayer³

28
- 0020192086
- (1982) Appl. Phys. A , vol.29 , pp. 69
- Bartur¹ Nicolet²

29
- 0020826476
- (1983) J. Appl. Phys. , vol.54 , Issue.9 , pp. 5404
- Bartur¹ Nicolet²

30
- 0020782160
- (1983) Thin Solid Films , vol.105 , pp. 285
- d'Heurle¹

31
- 0021945005
- Advanced applications of ion implantation
- (1985) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.530 , pp. 152
- Kim¹ Banwell² Shima³ Nicolet⁴

32
- 84918478169
- C. S. Petersson and F. M. d'Heurle, unpublished results, 1978.

33
- 11744353772
- (1982) Appl. Phys. Lett. , vol.40 , Issue.2 , pp. 175
- Bartur¹ Nicolet²

34
- 0021197937
- (1984) Appl. Phys. Lett. , vol.44 , Issue.2 , pp. 263
- Bartur¹ Nicolet²

35
- 0003807768
- 3rd Edition, Reinhold, New York
- (1967) Protective Coatings for Metals , pp. 654-657
- Burns¹ Bradley²

36
- 1642621158
- (1965) J. Appl. Phys. , vol.36 , Issue.12 , pp. 3770
- Deal¹ Grove²

37
- 0021098753
- (1983) Thin Solid Films , vol.107 , pp. 55
- Bartur¹

38
- 0021374025
- (1984) J. Electrochem. Soc. , vol.131 , Issue.2 , pp. 371
- Bartur¹ Nicolet²

39
- 0019875269
- (1981) Thin Solid Films , vol.79 , pp. 51
- Cheung¹ Nicolet² Wittmer³ Evans⁴ Sheng⁵

40
- 0018845363
- (1980) J. Appl. Phys. , vol.51 , Issue.1 , pp. 373
- Petersson¹ Anderson² Beglin³ Dempsey⁴ Hammer⁵ d'Heurle⁶ LaPlaca⁷

41
- 30744435141
- (1967) Trans. Metall. Soc. AIME , vol.239 , pp. 1109
- Hashimoto¹

42
- 84918478168
- J. Lajzerowicz, J. Torres, G. Goltz and R. Pantel, to be published.

43
- 0022094016
- (1985) J. Electrochem. Soc. , vol.132 , Issue.7 , pp. 1745
- Massoud¹ Plummer² Irene³

44
- 0021515122
- Thermal oxidation of silicides
- (1980) Journal of Applied Physics , vol.56 , Issue.7 , pp. 2127
- Lie¹ Tiller² Saraswat³

45
- 0011734337
- (1976) J. Phys. Chem. , vol.80 , Issue.16 , pp. 1773
- Doremus¹

46
- 0021468246
- (1984) J. Appl. Phys. , vol.56 , Issue.2 , pp. 589
- Fargeix¹ Ghibaudo²

47
- 84918478167
- E. A. Lewis and E. A. Irene, J. Vac. Sci. Technol., to be published.

48
- 0017956476
- (1978) Solid-State Electron. , vol.21 , pp. 667
- Pretorius¹ Harris² Nicolet³

49
- 0021466317
- (1984) J. Appl. Phys. , vol.56 , Issue.1 , pp. 147
- Beyers¹

50
- 2242483418
- Phase equilibria in thin-film metallizations
- (1984) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.2 , Issue.4 , pp. 147
- Beyers¹ Thomas²

51
- 0015399959
- (1972) J. Appl. Phys. , vol.43 , Issue.9 , pp. 3643
- Hiraki¹ Lugujjo² Mayer³

52
- 0020763142
- (1983) J. Phys. (Paris) , vol.44 , Issue.6 , pp. 707
- Cros¹

53
- 0004277486
- Wiley, New York
- (1982) MOS Physics and Technology , pp. 741
- Nicollian¹ Brews²

54
- 0003667453
- Pergamon, Oxford
- (1969) Silicon Semiconductor Data , pp. 602
- Wolf¹

55
- 84891995859
- Characterization of thermal oxides grown on TaSi2/polysilicon films
- (1985) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.3 , Issue.2 , pp. 492
- Pawlik¹ Oppolzer² Hillmer³

56
- 84918478166
- F. M. D'Heurle, in P. Balk and O. G. Folberth (eds), Studies in Electrical and Electronic Engineering 23: Solid State Devices 1985, Elsevier, Amsterdam, to be published.

57
- 0021306756
- (1984) Thin Solid Films , vol.116 , pp. 383
- Valyi¹ Lu² Steffen³ Maier⁴ Balk⁵ Guylai⁶

58
- 0021502342
- (1984) J. Vac. Sci. Technol. B , vol.2 , pp. 733
- Rosler¹ Engle²

59
- 84918478165
- C. S. Petersson and H. Norström, personal communication, 1985.

60
- 0022145440
- (1985) J. Electrochem. Soc. , vol.132 , Issue.10 , pp. 2312
- Barcz¹ Bartur² Banwell³ Nicolet⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.