|
Volumn 28, Issue 6, 1985, Pages 171-179
|
BOROPHOSPHOSILICATE GLASSES FOR INTEGRATED CIRCUITS.
|
Author keywords
[No Author keywords available]
|
Indexed keywords
INTEGRATED CIRCUITS - MATERIALS;
SILICATES - APPLICATIONS;
SEMICONDUCTING GLASS;
|
EID: 0022071013
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (46)
|
References (25)
|