On the Optimization of VLSI Contacts

IEEE Transactions on Electron Devices

Volumn 32, Issue 3, 1985, Pages 682-690

  Maddox, Roy L ^a  

^a Rockwell International   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS, OHMIC - MEASUREMENTS; ELECTRIC MEASUREMENTS - RESISTANCE; ELECTRIC NETWORKS - TRANSMISSION LINE THEORY; SEMICONDUCTOR DEVICES - JUNCTIONS;

CONTACT BARRIER; CONTACT-RESISTANCE CHARACTERISTIC; SPREADING-RESISTANCE PROFILE (SRP);

INTEGRATED CIRCUITS, VLSI;

EID: 0022025575     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1985.21999     Document Type: Article

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