Complete Characterization of Thin- and Thick-Film Materials Using Wideband Reflection Acoustic Microscopy

IEEE Transactions on Sonics and Ultrasonics

Volumn 32, Issue 2, 1985, Pages 248-258

  Lee, Chin C ^a   Tsai, Chen S ^a   Cheng, Xin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMAGING; MICROSCOPES;

MATERIAL CHARACTERIZATION; REFLECTION ACOUSTIC MICROSCOPY; THICK FILMS; THIN FILMS;

FILMS;

EID: 0022024990     PISSN: 00189537     EISSN: None     Source Type: Journal    
DOI: 10.1109/T-SU.1985.31591     Document Type: Article

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