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Journal of Applied Physics

Volumn 57, Issue 4, 1985, Pages 1214-1238

Electron heating in silicon dioxide and off-stoichiometric silicon dioxide films

(6) DiMaria, D J a Theis, T N a Kirtley, J R a Pesavento, F L a Dong, D W a Brorson, S D b

a IBM T J WATSON RESEARCH CENTER (United States)

b MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS - ELECTRON STATES; ELECTRIC FIELD EFFECTS; ELECTROLUMINESCENCE; SEMICONDUCTING FILMS - CHARGE CARRIERS; SILICA - THERMAL EFFECTS;

DIELECTRIC BREAKDOWN; ELECTRON HEATING; ELECTRONIC CARRIER HEATING; SILICON DIOXIDE FILMS;

SEMICONDUCTOR DEVICES;

EID: 0022013081 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.334518 Document Type: Article

Times cited : (139)

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