Formation of silicon on insulator structures by ion implantation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 530, Issue , 1985, Pages 230-239

  Hemment, P L F ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BURIED DIELECTRIC LAYERS; BURIED NITRITES; REACTIVE IONS; SILICON ON INSULATOR STRUCTURES; SILICON WAFERS; SUBSTRATES;

SEMICONDUCTING SILICON;

EID: 0021979353     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.946491     Document Type: Conference Paper

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