EVIDENCE FOR PAIRING OF IMPLANTED NITROGEN IN SILICON.

Volumn , Issue , 1985, Pages 839-845

  Stein, H J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED RADIATION - ABSORPTION; NITROGEN - ISOTOPES;

INFRARED ABSORPTION; LOCAL MODES; PAIRING OF IMPLANTED NITROGEN;

SEMICONDUCTING SILICON;

EID: 0021822988     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)