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Volumn , Issue , 1984, Pages 386-393
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DEVELOPMENT TRENDS IN ULTRA THIN GATE DIELECTRICS FOR ULTRA LARGE SCALE INTEGRATION (ULSI).
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC DEVICES - MANUFACTURE;
HOT CARRIER EFFECTS;
ION IMPLANTATION;
PLASMA ETCHING;
ULTRA LARGE SCALE INTEGRATION;
ULTRA THIN GATE DIELECTRICS;
INTEGRATED CIRCUITS;
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EID: 0021541966
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (4)
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References (20)
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