메뉴 건너뛰기




Volumn 23, Issue 20, 1984, Pages 3571-3596

Multiple determination of the optical constants of thin-film coating materials

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL CONSTANTS; OPTICAL MATERIALS; OPTICAL MULTILAYER INTERFERENCE COATINGS;

EID: 0021513002     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.23.003571     Document Type: Article
Times cited : (264)

References (33)
  • 1
    • 84975643275 scopus 로고
    • Optical Evaluation Techniques for Thin Films
    • J. M. Bennett, “Optical Evaluation Techniques for Thin Films, ” J. Opt. Soc. Am. 73, 1865A (1983).
    • (1983) J. Opt. Soc. Am. , vol.1865A , pp. 73
    • Bennett, J.M.1
  • 2
    • 84975671565 scopus 로고
    • Mechanical Characterization of Optical Films
    • H. K. Pulker, “Mechanical Characterization of Optical Films, ” J. Opt. Soc. Am. 73, 1865A (1983).
    • (1983) J. Opt. Soc. Am. , vol.1865A , pp. 73
    • Pulker, H.K.1
  • 3
    • 0003428285 scopus 로고
    • McGraw-Hill, New York, refractive index of fused silicaequations for calculating n and k from Tf, Rf, and film thickness
    • D. E. Gray, Ed., American Institute of Physics Handbook (McGraw-Hill, New York, 1972), p. 6-28 (refractive index of fused silica); p. 6-120 (equations for calculating n and k from Tf, Rf, and film thickness).
    • (1972) American Institute of Physics Handbook , pp. 6-28
    • Gray, D.E.1
  • 5
    • 84889165813 scopus 로고
    • Optical Constants of Rh Films in Visible
    • J. K. Coulter, G. Hass, and J. B. Ramsey Jr., “Optical Constants of Rh Films in Visible, ” J. Opt. Soc. Am. 63, 1149 (1973).
    • (1973) J. Opt. Soc. Am , vol.63 , pp. 1149
    • Coulter, J.K.1    Hass, G.2    Ramsey, J.B.3
  • 8
    • 0016986599 scopus 로고
    • Structure-Related Optical Characteristics of Thin Metallic Films in the Visible and Ultraviolet
    • H. E. Bennett and J. L. Stanford, “Structure-Related Optical Characteristics of Thin Metallic Films in the Visible and Ultraviolet, ” J. Res. Natl. Bur. Stand. Sect. A 80, 643 (1976).
    • (1976) J. Res. Natl. Bur. Stand. Sect. A , vol.80 , pp. 643
    • Bennett, H.E.1    Stanford, J.L.2
  • 9
    • 0019569628 scopus 로고
    • Stylus Profiling Instrument for Measuring Statistical Properties of Smooth Optical Surfaces
    • J. M. Bennett and J. H. Dancy, “Stylus Profiling Instrument for Measuring Statistical Properties of Smooth Optical Surfaces, ” Appl. Opt. 20, 1785 (1981).
    • (1981) Appl. Opt. , vol.20 , pp. 1785
    • Bennett, J.M.1    Dancy, J.H.2
  • 10
    • 0017016851 scopus 로고
    • Measurement of the rms Roughness, Autocovariance Function, and Other Statistical Properties of Optical Surfaces Using a FECO Scanning Interferometer
    • J. M. Bennett, “Measurement of the rms Roughness, Autocovariance Function, and Other Statistical Properties of Optical Surfaces Using a FECO Scanning Interferometer, ” Appl. Opt. 15, 2705 (1976).
    • (1976) Appl. Opt. , vol.15 , pp. 2705
    • Bennett, J.M.1
  • 11
    • 0018014799 scopus 로고
    • Scattering Characteristics of Optical Materials
    • H. E. Bennett, “Scattering Characteristics of Optical Materials, ” Opt. Eng. 17, 480 (1978).
    • (1978) Opt. Eng. , vol.17 , pp. 480
    • Bennett, H.E.1
  • 12
    • 0018032081 scopus 로고
    • Scattering from Infrared Missile Domes
    • P. C. Archibald and H. E. Bennett, “Scattering from Infrared Missile Domes, ” Opt. Eng. 17, 647 (1978).
    • (1978) Opt. Eng. , vol.17 , pp. 647
    • Archibald, P.C.1    Bennett, H.E.2
  • 13
    • 84975650637 scopus 로고
    • G. Hass and R. E. Thun, EdsAcademic, New York, see especially pp. 42-44Transmittance of a Thin Film on a Nonabsorbing Substrate
    • H. E. Bennett and J. M. Bennett, in Physics of Thin Films, Vol. 4, G. Hass and R. E. Thun, Eds. (Academic, New York, 1967), pp. 1-96 (see especially pp. 42-44, “Transmittance of a Thin Film on a Nonabsorbing Substrate”).
    • (1967) Physics of Thin Films , vol.4 , pp. 1-96
    • Bennett, H.E.1    Bennett, J.M.2
  • 16
    • 0000416414 scopus 로고
    • Refractive Index of Fused Silica
    • I. H. Malitson, “Refractive Index of Fused Silica, ” J. Opt. Soc. Am. 55, 1205 (1965).
    • (1965) J. Opt. Soc. Am. , vol.55 , pp. 1205
    • Malitson, I.H.1
  • 17
    • 0016486677 scopus 로고
    • Ellip-sometric Function of a Film-Substrate System: Applications to the Design of Refraction-type Optical Devices and to Ellipso-metry
    • R. M. A. Azzam, A.-R. M. Zaghloul and N. M. Bashara, “Ellip-sometric Function of a Film-Substrate System: Applications to the Design of Refraction-type Optical Devices and to Ellipso-metry, ” J. Opt. Soc. Am. 65, 252 (1975).
    • (1975) J. Opt. Soc. Am. , vol.65 , pp. 252
    • Azzam, R.M.A.1    Zaghloul, A.-R.M.2    Bashara, N.M.3
  • 18
    • 0020204060 scopus 로고
    • Automatic Determination of the Optical Constants of Inhomogeneous Thin Films
    • J. P. Borgogno, B. Lazarides, and E. Pelletier, “Automatic Determination of the Optical Constants of Inhomogeneous Thin Films, ” Appl. Opt. 21, 4020 (1982).
    • (1982) Appl. Opt. , vol.21 , pp. 4020
    • Borgogno, J.P.1    Lazarides, B.2    Pelletier, E.3
  • 19
    • 0020738061 scopus 로고
    • An Improved Method for the Determination of the Extinction Coefficient of Thin Film Materials
    • J. P. Borgogno and B. Lazarides, “An Improved Method for the Determination of the Extinction Coefficient of Thin Film Materials, ” Thin Solid Films 102, 209 (1983).
    • (1983) Thin Solid Films , vol.102 , pp. 209
    • Borgogno, J.P.1    Lazarides, B.2
  • 20
    • 0042043747 scopus 로고
    • Extermination Automatique des Constantes Optiques et de lÉpaisseur des Couches Minces: Application aux Couches Diélectriques
    • E. Pelletier, P. Roche, and B. Vidal, “Extermination Automatique des Constantes Optiques et de l’Épaisseur des Couches Minces: Application aux Couches Diélectriques, ” Nouv. Rev. Opt. 7, 353 (1976).
    • (1976) Nouv. Rev. Opt. , vol.7 , pp. 353
    • Pelletier, E.1    Roche, P.2    Vidal, B.3
  • 22
    • 0042553279 scopus 로고
    • Smoothing and Differentiation of Data by Simplified Least Squares Procedures
    • A. Savitsky and M. J. E. Golay, “Smoothing and Differentiation of Data by Simplified Least Squares Procedures, ” Anal. Chem. 36, 1627 (1964).
    • (1964) Anal. Chem. , vol.36 , pp. 1627
    • Savitsky, A.1    Golay, M.J.E.2
  • 23
    • 0037654919 scopus 로고
    • Determination of the Optical Constants of Weakly Absorbing Thin Films
    • A. S. Valeev, “Determination of the Optical Constants of Weakly Absorbing Thin Films, ” Opt. Spectrosc. USSR 15, 269 (1963).
    • (1963) Opt. Spectrosc. USSR , vol.15 , pp. 269
    • Valeev, A.S.1
  • 24
    • 0002869438 scopus 로고
    • Constants of Thin Weakly Absorbing Lasers
    • A. S. Valeev, “Constants of Thin Weakly Absorbing Lasers, ” Opt. Spectrosc. USSR 18, 498 (1965).
    • (1965) Opt. Spectrosc. USSR , vol.18 , pp. 498
    • Valeev, A.S.1
  • 25
    • 0015313541 scopus 로고
    • Derivation of Optical Constants of Metals from Thin-Film Measurements at Oblique Incidence
    • J. E. Nestell Jr., and R. W. Christy, “Derivation of Optical Constants of Metals from Thin-Film Measurements at Oblique Incidence, ” Appl. Opt. 11, 643 (1972).
    • (1972) Appl. Opt. , vol.11 , pp. 643
    • Nestell, J.E.1    Christy, R.W.2
  • 26
    • 84933375795 scopus 로고
    • Optical Constants of Oxidized Thin Metal Films
    • C. K. Carniglia and B. Vidal, “Optical Constants of Oxidized Thin Metal Films, ” J. Opt. Soc. Am. 71, 1554 (1981).
    • (1981) J. Opt. Soc. Am. , vol.71 , pp. 1554
    • Carniglia, C.K.1    Vidal, B.2
  • 27
    • 0020767161 scopus 로고
    • Algebraic Method for Extracting Thin-Film Optical Parameters from Spectrophotometer Measurements
    • W. E. Case, “Algebraic Method for Extracting Thin-Film Optical Parameters from Spectrophotometer Measurements, ” Appl. Opt. 22, 1832 (1983).
    • (1983) Appl. Opt. , vol.22 , pp. 1832
    • Case, W.E.1
  • 28
    • 84975595586 scopus 로고
    • Method for Synthesis of Optical Thin-Film Coatings on Small Computers
    • W. E. Case and M. K. Purvis, “Method for Synthesis of Optical Thin-Film Coatings on Small Computers, ” J. Opt. Soc. Am. 73, 1879A (1983).
    • (1983) J. Opt. Soc. Am. , vol.1879A , pp. 73
    • Case, W.E.1    Purvis, M.K.2
  • 30
    • 0020830645 scopus 로고
    • Determination of Optical Constants of Thin Film Coating Materials Based on Inverse Synthesis
    • J. A. Dobrowolski, F. C. Ho, and A. Waldorf, “Determination of Optical Constants of Thin Film Coating Materials Based on Inverse Synthesis, ” Appl. Opt. 22, 3191 (1983).
    • (1983) Appl. Opt. , vol.22 , pp. 3191
    • Dobrowolski, J.A.1    Ho, F.C.2    Waldorf, A.3
  • 31
    • 84975541790 scopus 로고
    • Computational Method for Determining n and k for a Thin Film from the Measured Reflectance, Transmittance, and Film Thickness
    • J. M. Bennett, and M. J. Booty, “Computational Method for Determining n and k for a Thin Film from the Measured Reflectance, Transmittance, and Film Thickness, ” Appl. Opt. 5, 41 (1966).
    • (1966) Appl. Opt. , vol.5 , pp. 41
    • Bennett, J.M.1    Booty, M.J.2
  • 33
    • 0017017243 scopus 로고
    • A Simple Method for the Determination of the Optical Constants n1k and the Thickness of a Weakly Absorbing Thin Film
    • 1k and the Thickness of a Weakly Absorbing Thin Film, ” J. Phys. E 9, 1002 (1976).
    • (1976) J. Phys. E , vol.9 , pp. 1002
    • Manifacier, J.C.1    Gasiot, J.2    Fillard, J.D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.