메뉴 건너뛰기




Volumn 31, Issue 9, 1984, Pages 1238-1244

MOSFET Degradation Due to Stressing of Thin Oxide

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS - MEASUREMENTS; DATA STORAGE, DIGITAL - FIXED; DATA STORAGE, SEMICONDUCTOR - STORAGE DEVICES; TRANSISTORS, FIELD EFFECT - MEASUREMENTS;

EID: 0021482910     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1984.21694     Document Type: Article
Times cited : (107)

References (20)
  • 1
    • 0019690704 scopus 로고
    • High-field generation of electron traps and charge trapping in ultra-thin SiO2
    • C. Jenq, I. R. Ranganath, C. H. Huang, H. S. Jones, and T.T.L. Chang, “High-field generation of electron traps and charge trapping in ultra-thin SiO2,” inIEDM Tech. Dig., p. 388, 1981.
    • (1981) IEDM Tech. Dig. , pp. 388
    • Jenq, C.1    Ranganath, I.R.2    Huang, C.H.3    Jones, H.S.4    Chang, T.T.L.5
  • 2
    • 0019665266 scopus 로고
    • Electron trapping in very thin thermal silicon dioxide
    • M-S. Liang, and C. Hu, “Electron trapping in very thin thermal silicon dioxide,” in IEDM Tech. Dig., p. 396, 1981.
    • (1981) IEDM Tech. Dig. , pp. 396
    • Liang, M-S.1    Hu, C.2
  • 3
    • 0020098637 scopus 로고
    • Threshold-voltage instability of n-channel MOSFET's under bias-temperature aging
    • N. Shiono and C. Hashimoto, “Threshold-voltage instability of n-channel MOSFET's under bias-temperature aging,” IEEE Trans. Electron Devices, vol. ED-29, p. 361, 1982.
    • (1982) IEEE Trans. Electron Devices , vol.ED-29 , pp. 361
    • Shiono, N.1    Hashimoto, C.2
  • 6
    • 0002055406 scopus 로고
    • The properties of electron and hole traps in thermal SiO2layers grown on silicon
    • D. J. DiMaria, “The properties of electron and hole traps in thermal SiO2layers grown on silicon,” in Proc. Int. Topical Conf, Dig. Tech. Papers, p. 160, 1978.
    • (1978) Proc. Int. Topical Conf, Dig. Tech. Papers , pp. 160
    • DiMaria, D.J.1
  • 7
    • 0019561675 scopus 로고
    • Positive and negative charging of thermally grown Si02 induced by Fowler-Nordheim emission
    • M. Itsumi, “Positive and negative charging of thermally grown Si02 induced by Fowler-Nordheim emission,” J. Appl. Phys., vol. 52, p. 3491, 1981.
    • (1981) J. Appl. Phys. , vol.52 , pp. 3491
    • Itsumi, M.1
  • 8
    • 36749107295 scopus 로고
    • Hole injection and transport in Si02 films on Si
    • Z. A. Weinberg, “Hole injection and transport in Si02 films on Si,” Appl. Phys. Lett., vol. 27, p. 437, 1975.
    • (1975) Appl. Phys. Lett. , vol.27 , pp. 437
    • Weinberg, Z.A.1
  • 9
    • 0016082018 scopus 로고
    • Determination of the sign of carrier transported across Si02 films on Si
    • Z. A. Weinberg, W. C. Johnson, and M. A. Lampert, “Determination of the sign of carrier transported across Si02 films on Si,” Appl, Phys. Lett., vol. 25, p. 42, 1974.
    • (1974) Appl, Phys. Lett. , vol.25 , pp. 42
    • Weinberg, Z.A.1    Johnson, W.C.2    Lampert, M.A.3
  • 10
    • 0020902148 scopus 로고
    • Carrier tunneling related phenomena in thin-gate MOSFETs
    • C. Chang, M. S. Liang, C. Hu, and R. W. Brodersen, “Carrier tunneling related phenomena in thin-gate MOSFETs,” in IEDM Tech. Dig., p. 194, 1983.
    • (1983) IEDM Tech. Dig. , pp. 194
    • Chang, C.1    Liang, M.S.2    Hu, C.3    Brodersen, R.W.4
  • 11
    • 0001526299 scopus 로고
    • Relationship between trapped holes and interface states in MOS capacitors
    • G. Hu and W. C. Johnson, “Relationship between trapped holes and interface states in MOS capacitors,” Appl. Phys. Lett., vol. 36, p.590, 1980.
    • (1980) Appl. Phys. Lett. , vol.36 , pp. 590
    • Hu, G.1    Johnson, W.C.2
  • 12
    • 0003164115 scopus 로고
    • Two-carrier nature of interface-states generation in hole trapping and radiation damage
    • S. K. Lai, “Two-carrier nature of interface-states generation in hole trapping and radiation damage,” Appl. Phys. Lett., vol. 39, p. 58, 1981.
    • (1981) Appl. Phys. Lett. , vol.39 , pp. 58
    • Lai, S.K.1
  • 13
    • 36749121891 scopus 로고
    • Electron trapping in Si02-An injection mode dependent phenomenon
    • B. Eitan, D. Frohman-Benchkowsky, J. Shappir, and M. Balog, “Electron trapping in Si02-An injection mode dependent phenomenon,” Appl. Phys. Lett., vol. 40, p. 523, 1982.
    • (1982) Appl. Phys. Lett. , vol.40 , pp. 523
    • Eitan, B.1    Frohman-Benchkowsky, D.2    Shappir, J.3    Balog, M.4
  • 14
    • 0014805372 scopus 로고
    • A quasi-static technique for MOS C-V and surface state measurements
    • M. Kuhn, “A quasi-static technique for MOS C-V and surface state measurements,” Solid-State Electron., vol. 13, p. 873, 1970.
    • (1970) Solid-State Electron. , vol.13 , pp. 873
    • Kuhn, M.1
  • 15
    • 0017271820 scopus 로고
    • Origin of interface states and oxide charges generated by ionizing radiation
    • C. T. Sah, “Origin of interface states and oxide charges generated by ionizing radiation,” IEEE Trans. Nucl. Sci. vol. NS-23, p. 1563, 1976.
    • (1976) IEEE Trans. Nucl. Sci. , vol.NS-23 , pp. 1563
    • Sah, C.T.1
  • 16
    • 0016509127 scopus 로고
    • Theory of the MOS transistor in weak inversion-new method of determine the number of surface states
    • R. J. Van Overstraeten, G. J. Declerck, and P. A. Muls, “Theory of the MOS transistor in weak inversion-new method of determine the number of surface states,” IEEE Trans. Electron Devices, vol. ED-22, p. 282, 1975.
    • (1975) IEEE Trans. Electron Devices , vol.ED-22 , pp. 282
    • Van Overstraeten, R.J.1    Declerck, G.J.2    Muls, P.A.3
  • 18
    • 0019048875 scopus 로고
    • Electron mobility in inversion and accumulation layer on thermally oxidized silicon surface
    • S. C. Sun, and J. D. Plummer, “Electron mobility in inversion and accumulation layer on thermally oxidized silicon surface,” IEEE Trans. Electron Devices, vol. ED-27, 1497, 1980.
    • (1980) IEEE Trans. Electron Devices , vol.ED-27 , Issue.1497
    • Sun, S.C.1    Plummer, J.D.2
  • 20
    • 0019664378 scopus 로고
    • A unified model for hot-electron current in MOSFETs
    • P. Ko, R. S. Muller, and C. Hu, “A unified model for hot-electron current in MOSFETs,” in IEDM Tech. Dig., p. 600, 1981.
    • (1981) IEDM Tech. Dig. , pp. 600
    • Ko, P.1    Muller, R.S.2    Hu, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.