The origin of interfacial charging in irradiated silicon nitride capacitors

Journal of Applied Physics

Volumn 56, Issue 4, 1984, Pages 1044-1050

  Hughes, R C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; SILICON COMPOUNDS;

INTERFACIAL CHARGING; SILICON NITRIDE CAPACITORS;

CAPACITORS;

EID: 0021481638     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.334071     Document Type: Article

References (0)