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Volumn 56, Issue 3, 1984, Pages 608-626

Improved quartz crystal microbalance technique

Author keywords

[No Author keywords available]

Indexed keywords

FILMS - THICKNESS MEASUREMENT; QUARTZ;

EID: 0021477434     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.333990     Document Type: Article
Times cited : (167)

References (51)
  • 10
    • 84951376939 scopus 로고    scopus 로고
    • The principal value of the reverse tan function is termed “arctan,” thus, arctan [formula omitted]
  • 11
    • 84951376938 scopus 로고    scopus 로고
    • Z-Match is a registered trademark of Inficon Leybold-Heraeus Inc., East Syracuse, New York
  • 12
    • 84951376937 scopus 로고    scopus 로고
    • As compared to the definition given by Lu and Lewis (Ref. 9) in this paper the specific acoustic impedance ratio z is reciprocally defined. This is in consistency with the reduced parameters used here, each of which has the respective quartz parameter as denominator
  • 25
    • 84951376936 scopus 로고    scopus 로고
    • Data released by Inficon Leybold-Heraeus, Inc., East Syracuse, New York
  • 27
    • 84951367609 scopus 로고
    • Proceedings of the 31st Annual Symposium on Frequency Control, U.S. Army Electronics Research and Development Command, Fort Monmouth, New JerseyNTIS-National Technical Information Service, Accession No. AD423381
    • (1977) , pp. 44-47
    • Tiersten, H.F.1    Smythe, R.C.2
  • 28
    • 84951376718 scopus 로고
    • Leybold-Heraeus/Inficon patent pending in: FRG DE 3145309 Al, Austria A 5710/80, France 81.21976, England 81.35283, USA 32 46 23
    • (1981)
    • Harms, K.C.1    Benes, E.2
  • 29
    • 84951376717 scopus 로고
    • For definitions of resonance frequency types refer to IEEE Standard No. 177 1966 ANSI C83. 17
    • (1970)
  • 32
    • 84951376722 scopus 로고
    • The principal arrangement is chosen according to DIN 45105, IEC as far as applicable to the derivation of the admittance versus frequency locus
    • (1978) , vol.444
  • 36
    • 84951376721 scopus 로고    scopus 로고
    • Here and throughout this paper sinusoidal time dependence is assumed. Time-varying quantities are expressed as phasors with suppressed [formula omitted] dependence of time t with ω being the angular frequency and j the imaginary unit. For example, the complex phasor force F at the regarded acoustic port corresponds to an instantaneous force given by [formula omitted] where Re means “the real part of.” The absolute value of the amplitude is indicated by [formula omitted]
  • 37
    • 84951376720 scopus 로고    scopus 로고
    • In the main part of this paper, v was used for the (constant) phase velocity of the acoustic wave, while in the Appendixes A and B v is used exclusively for the time dependent particle velocity, which, in the regarded case of shear waves, is the time derivative of the mechanical particle displacement in a direction transversal to the sound propagation
  • 44
    • 84951376719 scopus 로고    scopus 로고
    • For the determination of [formula omitted] and [formula omitted] nonetheless the piezoelectrically “stiffened” elastic constant has to be used by definition. The short circuiting of the electrodes causes a frequency lowering and thus, a decrease of the “stiffening” of the effective elastic constant [compare Eq. (8) and Eq. (C2) in Appendix C]
  • 50
    • 84951376704 scopus 로고    scopus 로고
    • Numerical subscripts are abbreviated subscripts according to Voigt’s notation


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.