Composition and properties of the so-called "diamond-like" amorphous carbon films

Thin Solid Films

Volumn 118, Issue 3, 1984, Pages 311-320

  C Angus, John ^a   E Stultz, Janet ^a   J Shiller, Paul ^a   R MacDonald, Jack ^b   J Mirtich, Michael ^c   Domitz, Stan ^c  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b UNIVERSITY OF GUELPH   (Canada)

^c NASA GLENN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMONDS; FILMS - AMORPHOUS; SPECTROSCOPY, INFRARED;

MICROCOMBUSTION; NUCLEAR REACTIONS; RF DISCHARGES;

CARBON;

EID: 0021472753     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(84)90202-5     Document Type: Article

References (24)

1. Low-stress diamondlike carbon films
2. Chemisorbed hydrogen on a-carbon films
3. Ion beam deposited protective films
4. A 30 cm diameter argon ion source
5. Characterization of diamond like films
6. NMR and IR Studies on Hydrogenated Amorphous Si1-xCxFilms
7. The Permeability of Different Rubbers to Gases and Its Relation to Diffusivity and Solubility
8. Flow of gases through polyethylene