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Volumn 56, Issue 1, 1984, Pages 147-152
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Thermodynamic considerations in refractory metal-silicon-oxygen systems
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRATED CIRCUITS;
OXYGEN;
SEMICONDUCTING SILICON;
THERMODYNAMICS;
REFRACTORY METAL SILICIDES;
REFRACTORY METALS;
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EID: 0021466317
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.333738 Document Type: Article |
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Times cited : (222)
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References (0)
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