The scanning heavy ion microscope at GSI

Nuclear Inst. and Methods in Physics Research, B

Volumn 10-11, Issue PART 2, 1985, Pages 693-696

  Fischer, B E ^a  

^a GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM SCANNING; ENERGY LOSS IMAGING; MICROBEAMS; MICROLITHOGRAPHY; SECONDARY ELECTRON IMAGING;

MICROSCOPES, ION;

EID: 0021429519     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(85)90085-0     Document Type: Article

References (2)

1. Production and use of nuclear tracks: imprinting structure on solids
2. Collimation of ion beams to micrometer dimensions