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Surface and Interface Analysis

Volumn 6, Issue 2, 1984, Pages 75-77

Characterization of contamination layers by emission angle dependent XPS with a double‐pass CMA

(2) Hofmann, S a Sanz, J M a,b

a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS (Germany)

b UNIVERSIDAD AUTÓNOMA DE MADRID (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

SPUTTERING;

EID: 0021409056 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.740060207 Document Type: Article

Times cited : (28)

References (13)

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- 0019051699
- (1980) Surf. Interface Anal. , vol.2 , pp. 148
- Hofmann, S.¹

2
- 0018515860
- (1979) Appl. Surf. Sci. , vol.3 , pp. 251
- Kirschner, J.¹ Etzkorn, H.W.²

3
- 6244271871
- (1980) Nucl. Instrum. Meth. , vol.168 , pp. 329
- Littmark, U.¹ Hofer, W.O.²

4
- 0017439229
- (1977) Appl. Phys. , vol.12 , pp. 101
- Holm, R.¹ Storp, S.²

5
- 0000091030
- (1982) J. Trace Microprobe Tech. , vol.1 , pp. 213
- Hofmann, S.¹ Sanz, J.M.²

6
- 0013514055
- (1983) Z. Anal. Chem. , vol.314 , pp. 215
- Hofmann, S.¹ Sanz, J.M.²

7
- 0343737897
- (1978) J. Electr. Spect. Rel. Phen. , vol.14 , pp. 287
- Ebel, M.F.¹

8
- 0017705817
- in Proceedings of the 7th International Vacuum Congress and 3rd International Conference on Solid Surfaces, Vienna 1977, ed. by R. Dobrozemsky, F. Rüdenauer, F. P. Viehböck and A. Breth, Vol. III, p.
- (1977) , pp. 2617
- Palmberg, P.W.¹

9
- 0042681836
- (1981) Analusis , vol.9 , pp. 181
- Hofmann, S.¹

10
- 6244262341
- (1981) Analusis , vol.9 , pp. 171
- Seah, M.P.¹

11
- 0018436046
- (1979) Surf. Interface Anal. , vol.1 , pp. 2
- Seah, M.P.¹ Dench, W.A.²

12
- 0016070147
- (1974) Surf. Sci. , vol.43 , pp. 625
- Kim, K.S.¹ Winograd, N.²

13
- 0004270257
- Perkin‐Elmer Corporation, Eden Prairie, Minnesota USA
- (1979) Handbook of XPS
- Wagner, C.D.¹ Riggs, W.A.² Davis, L.E.³ Moulder, J.F.⁴ Muilenberg, G.E.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.