Capture and tunnel emission of electrons by deep levels in ultrathin nitrided oxides on silicon

Applied Physics Letters

Volumn 44, Issue 3, 1984, Pages 316-318

  Chang, Shuo Tung ^a   Johnson, N M ^a   Lyon, S A ^b  

^a PALO ALTO RESEARCH CENTER   (United States)

^b PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; SEMICONDUCTING SILICON;

SILICA;

EID: 0021375812     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.94737     Document Type: Article

References (16)