FINELY FOCUSED ION BEAMS - NEW TOOLS FOR TECHNOLOGY.

Volumn , Issue , 1983, Pages

  Brown, W L ^a   Wagner, A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; SEMICONDUCTOR MATERIALS - ION IMPLANTATION;

DIRECT WRITING TOOLS; SUBMICRON ION BEAMS;

ION BEAMS;

EID: 0020977765     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (35)