SELF-ALIGNED GaAs MESFET WITH W-Al GATE.

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Volumn , Issue , 1983, Pages 134-137

  Nakamura, H ^a   Sano, Y ^a   Nonaka, T ^a   Ishida, T ^a   Kaminishi, K ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIGEST OF PAPER; N-GALLIUM ARSENIDE FET; RESISTIVITY OF THICK FILM; SCHOTTKY CONTACT; SPUTTER DEPOSITED ALLOY FILM; THERMALLY STABLE REFRACTORY GATE METAL;

SEMICONDUCTOR DEVICES, FIELD EFFECT;

EID: 0020912849     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)