GENERATION OF less than 50 NM PERIOD GRATINGS USING EDGE DEFINED TECHNIQUES.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 1, Issue 4, 1983, Pages 1105-1108

  Flanders, D C ^a   Efremow, N N ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

HOLOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICA - ETCHING;

LITHOGRAPHY;

EID: 0020833614     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582643     Document Type: Conference Paper

References (10)