TWO-DIMENSIONAL ANALYSIS OF THERMAL OXIDATION OF SILICON.

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 22, Issue 8, 1983, Pages 514-516

  Sakina, Yasuharu ^a   Ohno, Tsuneo ^a   Matsumoto, Satoru ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON;

EID: 0020798516     PISSN: None     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.22.l514     Document Type: Article

References (10)