Influence of Short-Channel Effects on Dopant Profiles Obtained from the DC MOSFET Profile Method

IEEE Transactions on Electron Devices

Volumn 30, Issue 8, 1983, Pages 948-954

  Carver, Gary P ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES, MOSFET;

EID: 0020797401     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1983.21242     Document Type: Article

References (17)

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