Synchrotrom radiation X-ray lithography

Nuclear Instruments and Methods In Physics Research

Volumn 222, Issue 1-2, 1984, Pages 291-301

  Haelbich, R P ^a   Silverman, J P ^a   Warlaumont, J M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATORS, SYNCHROTRON; X-RAYS;

LITHOGRAPHY;

EID: 0020753677     PISSN: 01675087     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-5087(84)90547-7     Document Type: Article

References (25)

1. VLSI electronics microstructure science
2. Electron-beam, X-ray and ion-beam techniques for submicron lithographies II
3. Electron-beam, X-ray and ion-beam techniques for submicron lithographies II