Matrix effect and surface oxidation in depth profiling of Al xGa1-xAs by secondary ion mass spectrometry using O+2 primary ions

Journal of Applied Physics

Volumn 54, Issue 5, 1983, Pages 2672-2676

  Meyer, Ch ^a   Maier, M ^a   Bimberg, D ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS - OXIDATION; SEMICONDUCTING GALLIUM COMPOUNDS;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0020749711     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.332342     Document Type: Article

References (17)