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Journal of Applied Physics

Volumn 54, Issue 4, 1983, Pages 1860-1864

Growth of titanium silicide on ion-implanted silicon

(3) Revesz P a Gyimesi, J a Zsoldos, E a

a WIGNER RESEARCH CENTRE FOR PHYSICS (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

TITANIUM SILICON ALLOYS;

TITANIUM SILICIDE;

SEMICONDUCTING SILICON;

EID: 0020735744 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.332237 Document Type: Article

Times cited : (67)

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13
- 0003818607
- .(American Society for Testing Materials, Philadelphia)
- (1969) Inorganic Index to the Powder Diffraction File

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.