Small-Radii Curved Rib Waveguides in GaAs/GaAIAs Using Electron-Beam Lithography

Journal of Lightwave Technology

Volumn 1, Issue 1, 1983, Pages 236-240

  Austin, Michael W ^a   Flavin, Philip G ^a  

^a MARTLESHAM HEATH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; LITHOGRAPHY; SEMICONDUCTING GALLIUM ARSENIDE - APPLICATIONS;

COUPLING LOSS; ION-BEAM MILLING; SCATTERING LOSS; SMALL-RADII CURVED RIB WAVEGUIDES;

WAVEGUIDES, OPTICAL;

EID: 0020721491     PISSN: 07338724     EISSN: 15582213     Source Type: Journal    
DOI: 10.1109/JLT.1983.1072088     Document Type: Article

References (8)

1. E. A. J. Marcatili, “Bends in optical dielectric guides,” Bell Syst. Tech. J., vol. 48, pp. 2103-2132, Sept. 1969.
2. M. W. Austin, “Curved rib waveguides in GaAs/GaAlAs,” in Proc. First Eur. Conf Integrated Optics, (London, England), pp. 76-78, Sept. 1981.
3. M. W. Austin, “GaAs/GaAlAs curved rib waveguides,” IEEE J. Quantum Electron., vol. QE-18, pp. 795-800, Apr. 1982.
4. M. Heiblum and J. H, Harris, “Analysis of curved optical waveguides by conformal transformation,” IEEE J. Quantum Electron., vol. QE-11, pp. 75-83, Feb. 1975.
5. M. W. Austin, “Curved optical waveguides in III-V semiconductors,” Ph.D. thesis, University of London, London, England, 1982.
6. P. G. Flavin, “Fabrication of curved structures by electron beam lithography,” Electron. Lett., vol. 18, no. 20, pp. 865-867, Sept. 1982.
7. P. W. Whipps, “Negative resists based on polystyrene,” in Proc. Microcircuit Engineering 79, (Aachen, Germany), pp. 118-126, Sept. 1979.
8. M. Hatzakis, “Electron resists for microcircuit and mask production,” J. Electrochem. Soc., vol. 116, p. 1033, 1969.