|
Volumn 54, Issue 3, 1983, Pages 1423-1428
|
Characteristics of TiN gate metal-oxide-semiconductor field effect transistors
a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
SEMICONDUCTOR DEVICES, MOS;
TRANSISTORS, FIELD EFFECT;
|
EID: 0020720741
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.332167 Document Type: Article |
Times cited : (29)
|
References (29)
|