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Volumn 56, Issue 2, 1984, Pages 189-208

Optical techniques in plasma diagnostics

Author keywords

[No Author keywords available]

Indexed keywords

FLUORESCENCE; LASERS - APPLICATIONS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPY, INFRARED; SPECTROSCOPY, RAMAN;

EID: 0020703135     PISSN: 00334545     EISSN: 13653075     Source Type: Journal    
DOI: 10.1351/pac198456020189     Document Type: Article
Times cited : (157)

References (79)
  • 14
    • 84944307821 scopus 로고    scopus 로고
    • unpublished results.
    • R.A. Gottscho, unpublished results.
    • Gottscho, R.A.1
  • 15
    • 0011666245 scopus 로고
    • and references therein.
    • T. Ogawa and M. Higo, Chem. Phys. Lett. 65, 610 (1979), and references therein.
    • (1979) Chem. Phys. Lett. , vol.65 , pp. 610
    • Ogawa, T.1    Higo, M.2
  • 27
    • 4143061672 scopus 로고
    • Ionization Waves in Glow Discharges
    • ed. by M.N. Hirsh and H. Oskam, Academic Press (New York
    • A. Garscadden, “Ionization Waves in Glow Discharges,” in Gaseous Electronics Vol. 1, ed. by M.N. Hirsh and H. Oskam, Academic Press (New York, 1978), pp. 65–107.
    • (1978) Gaseous Electronics , vol.1 , pp. 65-107
    • Garscadden, A.1
  • 32
    • 0020920215 scopus 로고
    • in Laser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg, North Holland, (New York
    • S. Pang and S.R.J. Brueck, “Laser-Induced Fluorescence Diagnostics of CF4/02/H2 Plasma Etching,” in Laser Diagnostics and Photochemical Processing for Semiconductor Devices, ed. R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg, North Holland, (New York, 1983), p. 161.
    • (1983) Laser-Induced Fluorescence Diagnostics of CF4/02/H2 Plasma Etching , pp. 161
    • Pang, S.1    Brueck, S.R.J.2
  • 42
    • 84944307824 scopus 로고
    • ed. R.G. Frieser and C.J. Mogab, Electrochem. Soc. (St. Louis
    • R.H. Bruce, Proc. Symp. Plasma Proc., ed. R.G. Frieser and C.J. Mogab, Electrochem. Soc. (St. Louis, 1980), p. 243.
    • (1980) Proc. Symp. Plasma Proc. , pp. 243
    • Bruce, R.H.1
  • 44
  • 61
    • 0042925284 scopus 로고
    • and references therein.
    • B.S. Choi and H. Kim, Appl. Spectrosc. 36, 71 (1982), and references therein.
    • (1982) Appl. Spectrosc. , vol.36 , pp. 71
    • Choi, B.S.1    Kim, H.2
  • 66
    • 18744379402 scopus 로고
    • Spontaneous Raman scattering has also been used to detect oxygen atoms in high pressure flames by
    • Spontaneous Raman scattering has also been used to detect oxygen atoms in high pressure flames by J. Dasch and J.H. Bechtel, Opt. Lett. 6, 36 (1981).
    • (1981) Opt. Lett. , vol.6 , pp. 36
    • Dasch, J.1    Bechtel, J.H.2
  • 75
    • 84944295879 scopus 로고
    • San Francisco, Ca., May 8–13, abstract# 176.
    • F.Y. Robb, Electrochem. Soc. Meeting, San Francisco, Ca., May 8–13, 1983, abstract# 176.
    • (1983) Electrochem. Soc. Meeting
    • Robb, F.Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.