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Volumn 71, Issue 1, 1983, Pages 10-33

Device Modeling

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER-AIDED DEVICE MODELING; DEVICE NUMERICAL MODELING; POTENTIAL DISTRIBUTIONS; WAFER PROCESS SIMULATOR;

EID: 0020588565     PISSN: 00189219     EISSN: 15582256     Source Type: Journal    
DOI: 10.1109/PROC.1983.12524     Document Type: Article
Times cited : (130)

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