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Journal of Applied Physics

Volumn 53, Issue 9, 1982, Pages 6240-6245

Electrical conduction and breakdown in oxides of polycrystalline silicon and their correlation with interface texture

(3) Heimann, P A a Murarka, S P a Sheng, T T a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; SILICON OXIDES;

SILICON COMPOUNDS;

EID: 0020182975 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.331540 Document Type: Article

Times cited : (74)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.