Modeling of the Silicon Integrated-Circuit Design and Manufacturing Process

IEEE Transactions on Electron Devices

Volumn 30, Issue 9, 1983, Pages 968-986

  Dutton, Robert W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE;

INTEGRATED CIRCUITS;

EID: 0020180847     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1983.21250     Document Type: Article

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