Low Pressure Deposition of Phosphosilicate Glass Films

Journal of the Electrochemical Society

Volumn 129, Issue 7, 1982, Pages 1588-1592

  Levin, R M ^a   Adams, A C ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

CVD; dielectrics; integrated circuits; P glass

Indexed keywords

GLASS; INTEGRATED CIRCUITS;

FILMS;

EID: 0020151690     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2124213     Document Type: Article

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