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Volumn 29, Issue 4, 1982, Pages 639-644
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Properties of Interconnection on Silicon, Sapphire, and Semi-Insulating Gallium Arsenide Substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRATED CIRCUIT MANUFACTURE;
SEMICONDUCTOR DEVICE MANUFACTURE - SILICON ON SAPPHIRE TECHNOLOGY;
INTEGRATED CIRCUITS;
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EID: 0020113495
PISSN: 00189383
EISSN: 15579646
Source Type: Journal
DOI: 10.1109/T-ED.1982.20756 Document Type: Article |
Times cited : (38)
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References (11)
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