Fabrication Of Catheter-Tip And Sidewall Miniature Pressure Sensors

IEEE Transactions on Electron Devices

Volumn 29, Issue 1, 1982, Pages 57-63

  Esashi, Masayoshi ^a   Komatsu, Hiroshi ^a   Matsuo, Tadayuki ^a   Takahashi, Masafumi ^b   Takishima, Tamotsu ^b   Imabayashi, Kenichi ^b   Ozawa, Hideo ^c  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY SCHOOL OF MEDICINE   (Japan)

^c NIHON KOHDEN CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; SENSORS;

PRESSURE TRANSDUCERS;

EID: 0019914510     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/T-ED.1982.20658     Document Type: Article

References (7)

1. Samaun, K. D. Wise, and J. B. Angell, “An IC piezoresistive pressure sensor for biomedical instrumentation,” IEEE Trans. Biomed. Eng., vol. BME-20, pp. 101-109, 1973.
2. T. A. Nunn, and J. B. Angell, “An IC absolute pressure transducer with built-in reference chamber,” in Indwelling and Implantable Pressure Transducers, D. G. Fleming, W. H. KO, and M. R. Neuman, Eds. Cleveland, OH: CRC Press, 1977.
3. W. H. KO, J. Hynecek, and S. F. Boettcher, “Development of a miniature pressure transducer for biomedical applications,” IEEE Trans. Electron Devices, vol. ED-26, pp. 1896-1905, 1979.
4. J. M. Borky and K. D. Wise, “Integrated signal conditioning for silicon pressure sensors,” IEEE Trans. Electron Devices, vol.
5. M. Esashi, S. Nomoto, R. Quintero, and T. Matsuo, “Fabrication of biomedical miniature pressure transducer using IC techniques,” Trans. SOC. of Instrument and Control Eng. of Japan, vol. 15, pp.
6. C. S. Sander, J. W. Knutti, and J. D. Meindl, “Monolithic capacitance pressure transducer-IC with pulse period output,” IEEE Trans. Electron Devices, vol. ED-26, pp. 189-192, 1979.
7. R. L. Meek, “Electrochemically thinned N/N+ epitaxial silicon method and application,” J. Electrochem. SOC., vol. 118, pp, 1240-1246,1971,