Annealing of MOS capacitors with implications for test procedures to determine radiation hardness

IEEE Transactions on Nuclear Science

Volumn 28, Issue 6, 1981, Pages 4088-4094

  Winokur, P S ^a   Boesch, H E ^a  

^a US Army Research Development and Engineering Command   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICES, MOS - RADIATION EFFECTS;

CAPACITORS;

EID: 0019702348     PISSN: 00189499     EISSN: 15581578     Source Type: Journal    
DOI: 10.1109/TNS.1981.4335680     Document Type: Article

References (18)

1. G. F. Derbenwick and H. H. Sander, IEEE Trans. Nucl. Sci. NS-24, 2244 (1977).
2. D. H. Habing and B. D. Shafer, IEEE Trans. Nucl. Sci. NS-20, 307 (1973).
3. G. C. Messenger, Special Report, May 8, 1979.
4. D. K. Nichols, IEEE Trans. Nucl. Sci. NS-27, 1016 (1980).
5. M. Simons, IEEE Trans. Nucl. Sci. NS-21, 172 (1974).
6. H. E. Boesch, Jr., F. B. McLean, J. M. McGarrity, and G. A. Ausman, Jr., IEEE Trans. Nucl. Sci. NS-22, 2163 (1975).
7. F.B. McLean, H. E. Boesch, Jr., and J. M. McGarrity, IEEE Trans. Nucl. Sci. NS-23, 1506 (1976).
8. J. R. Srour, S. Othmer, O. L. Curtis, Jr., and K. Y. Chiu, IEEE Trans. Nucl. Sci. NS-23, 1513 (1976).
9. P. S. Winokur, H. E. Boesch, Jr., J. M. McGarrity, and F. B. McLean, J. Appl. Phys. 50, 3492 (1979).
10. H. E. Boesch, Jr., F. B. McLean, J. M. McGarrity, and P. S. Winokur, IEEE Trans. Nucl. Sci. NS-25, 1239 (1978).
11. L. M. Terman, Sol St. Electron. 5, 285 (1962).
12. P. V. Gray and D. M. Brown, Appl. Phys. Lett. 8, 31 (1966).
13. C. C. Chang and W. C. Johnson, IEEE Trans. Electron Devices ED-24, 1249 (1977).
14. N. Zamani and J. Maserjian, Proc. of Intl. Conf. on Phys. of SiO2 and Its Interfaces (Pergamon, New York, 1978), p. 443.
15. P. S. Winokur, H. E. Boesch, Jr., J. M. McGarrity, and F. B. McLean, IEEE Trans. Nucl. Sci. NS-24, 2113 (1977).
16. G. Hu, Ph.D. Dissertation, Princeton University (1979).
17. F. B. McLean, H. E. Boesch, Jr., P. S. Winokur, J. M. McGarrity, and R.B. Oswald, Jr., IEEE Trans. Nucl. Sci. NS-21, 47 (1974); also F.B. McLean, Harry Diamond Laboratories, HDL-TR-1765, (October 1976).
18. V. Danchenko, E. G. Stassinopoulos, P. H. Fang, and S. S. Brashears, IEEE Trans. Nucl. Sci. NS-27, 1658 (1980).