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Volumn 128, Issue 12, 1981, Pages 2660-2665

The Deposition of Silicon Films by Pyrolytic Decomposition of SiF2 Gas

Author keywords

amorphous Si:F; CVD kinetics; polymerization; thin films

Indexed keywords

FILMS - PREPARATION;

EID: 0019697745     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2127324     Document Type: Article
Times cited : (14)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.