PULSED ELECTRON BEAM PROCESSING OF SILICON DEVICES.

Materials Research Society Symposia Proceedings

Volumn 1, Issue , 1981, Pages 321-328

  Greenwald, A C ^a   Dolan, R P ^a   Tobin, S P ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PROCESSING; DIODES; ELECTRON BEAMS; ION IMPLANTATION; PULSED BEAMS; RESISTORS; SILICON DEVICES; TRANSISTORS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0019685055     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)