1 mu m Mo GATE MOS TECHNOLOGY.

Volumn , Issue , 1981, Pages 28-29

  Fukomoto, M ^a   Inoue, K ^a   Ogawa, S ^a   Okada, S ^a   Kugimiya, K ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

HIGH SPEED AND DENSITY VERY LARGE SCALE INTEGRATION; MOBILE IONS CONTAMINATION BLOCKAGE; ONE MICRON MOLYBDENUM GATE MOS TECHNOLOGY; SURFACE BORON OXIDATION; THIN HYDROCHLORIC ACID OXIDIZED GATE OXIDE;

SEMICONDUCTOR DEVICES, MOS;

EID: 0019676921     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)