NEW BIRD'S-BEAK FREE FIELD ISOLATION TECHNOLOGY FOR VLSI DEVICES.

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1981, Pages 384-387

  Kurosawa, Kei ^a   Shibata, Tadashi ^a   Iizuka, Hisakazu ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BIRD'S-BEAK FREE; BOX TECHNOLOGY; FIELD ISOLATION TECHNOLOGY; HIGH DEVICE DENSITY; LOCOS PROCESS; MOS DEVICES; NEAR-PERFECT PLANAR STRUCTURE; TWO-STEP OXIDE-BURYING PROCESS;

INTEGRATED CIRCUITS;

EID: 0019658122     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)