X-RAY LITHOGRAPHY USING A PULSED PLASMA SOURCE.

Journal of vacuum science & technology

Volumn 19, Issue 4, 1981, Pages 1190-1193

  Pearlman, J S ^a   Riordan, J C ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

PLASMAS - APPLICATIONS; X-RAYS - APPLICATIONS;

LITHOGRAPHY;

EID: 0019634706     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.571241     Document Type: Conference Paper

References (9)