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Journal of Applied Physics

Volumn 52, Issue 11, 1981, Pages 6659-6664

Oxidation kinetics of TiN thin films

(3) Wittmer, M a Noser, J a Melchior, H a

a ETH ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS - OXIDATION; INTEGRATED CIRCUITS;

TITANIUM NITRIDE;

TITANIUM COMPOUNDS;

EID: 0019633490 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.328659 Document Type: Article

Times cited : (293)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.