OPTICALLY ENHANCED OXIDATION OF SEMICONDUCTORS.

Journal of vacuum science & technology

Volumn 19, Issue 3, 1981, Pages 494-497

  Schafer, S A ^a   Lyon, S A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS;

SEMICONDUCTING SILICON;

EID: 0019613128     PISSN: 00225355     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.571045     Document Type: Conference Paper

References (11)