Single crystal silicon-on-oxide by a scanning cw laser induced lateral seeding process

Journal of the Electrochemical Society

Volumn 128, Issue 9, 1981, Pages 1981-1986

  Lam, H W ^a   Pinizzotto, R F ^a   Tasch, A F ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

laser induced epitaxy; silicon on insulator; zone melting

Indexed keywords

LASERS - APPLICATIONS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0019608162     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2127779     Document Type: Article

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