Synthesis, Radiation Degradation, and Electron Beam Resist Behavior of Fluorine-Containing Vinyl Polymers

Journal of the Electrochemical Society

Volumn 128, Issue 8, 1981, Pages 1758-1762

  Chen, C Y ^e   Cook, C F ^b  

^a UNIVERSITY OF ALABAMA   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

^c MOTOROLA INC   (United States)

^d YAMAGATA UNIVERSITY   (Japan)

^e Chemicals and Plastics ^*  (Australia)

Author keywords

electron beam lithography; plasma etching; positive resists

Indexed keywords

LITHOGRAPHY;

RESISTS;

FLUORINE CONTAINING POLYMERS;

EID: 0019606469     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2127726     Document Type: Article

References (16)

1. L. F. Thompson and R. E. Kerwin, Ann. Rev. Mater.Sci., 6, 267 (1976).
2. E. Spiller and R. Feder, Top. Appl. Phys., 22, 35(1978).
3. M. Dole, “The Radiation Chemistry of Macromolecules,” Vol. 1, Academic Press, New York (1973).
4. C. Y. Chen, C. U. Pittman, Jr., and J. N. Helbert,J. Polym. Sci. Polym. Chem. Ed., 18, 169 (1980).
5. C. U. Pittman, Jr., C. Y. Chen, M. Ueda, and J. N.Helbert, Polymer Preprints, 20, 602 (1979).
6. C. U. Pittman, Jr., C. Y. Chen, M. Ueda, J. N. Helbert, and J. H. Kwiatkowski, J. Polym. Sci. Polym. Chem. Ed., In press (1980).
7. M. Kakuchi, S. Sugawara, K. Murase, and K. Matsuyama, Journal of the Electrochemical Society, 124, 1648 (1977).
8. C. U. Pittman, Jr., M. Iqbal, C. Y. Chen, and J. N.Helbert, J. Polym. Sci. Polym. Chem. Ed., 16, 2721 (1978).
9. C. Y. Chen, M. Iqbal, C. U. Pittman, Jr., and J. N.Helbert, Makromol. Chem., 179, 2109 (1978).
10. J. N. Helbert, E. H. Poindexter, G. A. Stahl, C. Y. Chen, and C. U. Pittman, Jr., J. Polym. Sci. Polym. Chem. Ed., 17, 49 (1979).
11. J. N. Helbert, C. Y. Chen, C. U. Pittman, Jr., and G. L. Hagnauer, Macromolecules, 11, 1104 (1978).
12. J. N. Helbert, C. F. Cook, Jr., C. Y. Chen, and C. U.Pittman, Jr., Journal of the Electrochemical Society, 126, 694 (1979).
13. J. H. Lai, J. N. Helbert, C. F. Cook, Jr., C. U. Pittman, Jr., J. Vac. Sci. Technol., 16, 1992 (1979).
14. C. U. Pittman, Jr., M. Ueda, K. Iri, and Y. Imai,Macromolecules, 13, 1031 (1980).
15. C. U. Pittman, Jr., M. Ueda, and E. Wallace, Unpublished studies.
16. J. N. Helbert, E. H. Poindexter, C. U. Pittman, Jr., and C. Y. Chen, Polym. Eng. Sci., 9, 630 (1980).