SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Thin Solid Films

Volumn 92, Issue 1-2, 1982, Pages 1-17

Role of ions in ion-based film formation

(1) Takagi, T a

a KYOTO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; IONIZATION;

FILMS;

EID: 0019576147 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/0040-6090(82)90183-3 Document Type: Article

Times cited : (173)

References (73)

1
- 84914189496
- London, 1979, CEP Consultants, Edinburgh
- (1979) Proc. Int. Conf. on Ion Plating and Allied Techniques, IPAT 79 , pp. 174
- Takagi¹ Matsubara² Takaoka³ Yamada⁴

2
- 0018807851
- (1974) Thin Solid Films , vol.63 , pp. 41
- Takagi¹ Matsubara² Takaoka³ Yamada⁴

3
- 84914239524
- Tokyo, 1978, Institute of Electrical Engineers of Japan, Tokyo
- (1979) Proc. 3rd Symp. on Ion Sources and Applied Technology , pp. 125
- Takagi¹ Matsubara² Takaoka³

4
- 0017637421
- Vienna, 1977, Berger, Vienna
- (1977) Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. on Solid Surfaces , pp. 1533
- Weissmantel¹

5
- 0017962485
- (1978) Thin Solid Films , vol.50 , pp. 135
- Gautherin¹ Weissmantel²

6
- 84914795629
- London, 1979, CEP Consultants, Edinburgh
- (1979) Proc. Int. Conf. on Ion Plating and Allied Techniques, IPAT 79 , pp. 272
- Weissmantel¹ Bewilogua² Erier³ Reisse⁴

7
- 85069381419
- Vienna, 1977, Berger, Vienna
- (1977) Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. on Solid Surfaces , pp. 1545
- Schiller¹ Heising² Goedicke³

8
- 84914211068
- (1979) Oyo Butsuri , vol.48 , pp. 883
- Miyake¹ Yagi² Tokuyama³

9
- 4444276856
- (1973) C.R. Acad. Bulg. Sci. , vol.26 , Issue.2 , pp. 231
- Dobrev¹ Marinov²

10
- 0000846060
- (1977) Thin Solid Films , vol.42 , pp. 265
- Marinov¹ Dobrev²

11
- 0017557845
- (1977) Thin Solid Films , vol.46 , pp. 267
- Marinov¹

12
- 1542654444
- (1976) Thin Solid Films , vol.38 , pp. 1
- Babaev¹ Bykov² Guseva³

13
- 0017998599
- (1978) Thin Solid Films , vol.52 , pp. 445
- Hirsch¹ Varga²

14
- 0001519288
- Direct collection of some metal ions in an electromagnetic isotope separator and related surface effects
- (1969) Canadian Journal of Physics , vol.47 , pp. 2405
- Fontell¹ Arminen²

15
- 84914199223
- Tokyo, March 31, 1981, Japan Society of Applied Physics
- (1981) Dig. 27th Conf. of Applied Physics Society , pp. 278
- Cheng¹ Inokawa² Yamada³ Takagi⁴

16
- 84914199307
- Tokyo, 1981, Institute of Electrical Engineers of Japan, Tokyo
- (1981) Proc. 5th Symp. on Ion Sources and Ion-assisted Technology , pp. 171
- Cheng¹ Yamada² Takagi³

17
- 0017468218
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 690
- Amano¹ Lawson²

18
- 0017472191
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 695
- Amano¹ Lawson²

19
- 84914188189
- Metals, Ceramics and Materials
- 2nd Reprinting
- (1967) Sandia Monograph
- Mattox¹

20
- 0041008139
- (1968) J. Appl. Phys. , vol.39 , pp. 4650
- Palmberg¹ Todd² Rhodin³

21
- 0000950187
- (1968) J. Appl. Phys. , vol.39 , pp. 1874
- Chopra¹ Randlett²

22
- 84913850712
- Proc. Int. Conf. on Low Energy Ion Beams, Salford, 1977
- (1977) Inst. Phys. Conf. Ser. 38 , pp. 229
- Takagi¹ Yamada² Sasaki³

23
- 0000522538
- (1978) J. Cryst. Growth , vol.45 , pp. 318
- Takagi¹ Yamada² Matsubara³ Takaoka⁴

24
- 84914193829
- Tokyo, 1980, Institute of Electrical Engineers of Japan, Tokyo
- (1980) Proc. 4th Symp. on Ion Sources and Applied Technology , pp. 143
- Takaoka¹ Matsubara² Takagi³

25
- 0005776227
- (1953) J. Appl. Phys. , vol.24 , pp. 438
- Skinner¹ Savage² Rutzler³

26
- 0015636749
- (1973) IEEE Trans. Magn. , vol.9 , pp. 66
- Chen¹ Otto² Schmit³

27
- 0017478739
- (1977) J. Appl. Phys. , vol.16 , pp. 553
- Itoh¹ Nakamura² Muromachi³ Sugiyama⁴

28
- 0016952591
- (1976) J. Vac. Sci. Technol. , vol.13 , pp. 693
- Namba¹ Mōri²

29
- 0017244369
- (1976) Thin Solid Films , vol.39 , pp. 119
- Namba¹ Mōri²

30
- 0016527238
- (1975) J. Vac. Sci. Technol. , vol.12 , pp. 876
- Murayama¹

31
- 0009569249
- (1965) Appl. Phys. Lett. , vol.7 , pp. 140
- Chopra¹

32
- 0015436022
- (1972) J. Vac. Sci. Technol. , vol.9 , pp. 1385
- Bunshah¹ Raghuram²

33
- 0017729204
- Vienna, 1977, Berger, Vienna
- (1977) Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. on Solid Surfaces , pp. 1553
- Bunshah¹

34
- 0003875025
- T.J. Coutts, Academic Press, London, Chap. 2
- (1978) Active and Passive Thin Film Devices
- Campbell¹

35
- 0004277028
- McGraw-Hill, New York, Chap. 2
- (1969) Thin Film Phenomena
- Chopra¹

36
- 0003945508
- Academic Press, New York
- (1975) Epitaxial Growth
- Francombe¹

37
- 84996193301
- I. A mechanical spectrometer for analysing the energy distribution of sputtered atoms of copper or gold
- (1968) Philosophical Magazine , vol.18 , pp. 361
- Thomson¹

38
- 0001581520
- (1964) Electrochem. Technol. , vol.2 , pp. 295
- Mattox¹

39
- 84912999276
- Edinburgh, 1977, CEP Consultants, Edinburgh
- (1977) Proc. Ion Plating and Allied Techniques, IPAT 77 , pp. 13
- Teer¹

40
- 0015762596
- (1973) IEEE Trans. Electron Devices , vol.20 , pp. 1110
- Takagi¹ Yamada² Sasaki³ Ishibashi⁴

41
- 30244565462
- (1976) Thin Solid Films , vol.36 , pp. 117
- Dudonis¹ Pranevičius²

42
- 25944446051
- (1972) Surf. Sci. , vol.32 , pp. 222
- Geerk¹ Mayer²

43
- 0018105674
- Ionized beam doping in molecular-beam epitaxy of GaAs and AlxGa1−xAs
- (1978) Journal of Applied Physics , vol.49 , pp. 553
- Matsunaga¹ Suzuki² Takahashi³

44
- 84914188188
- Boston, 1961, Alloyd Corporation, Boston
- (1961) Proc. 3rd Symp. on Electron Beam Technology , pp. 368
- Flynt¹

45
- 0038335867
- (1968) J. Phys. D , vol.1 , pp. 457
- Probyn¹

46
- 0015080715
- (1971) J. Appl. Phys. , vol.42 , pp. 2953
- Aisenberg¹ Chabot²

47
- 84914204814
- Proc. Int. Conf. on Applications of Ion Beams to Metals, University of Warwick, 1975
- (1976) Inst. Phys. Conf. Ser. 28 , pp. 357
- Colligon¹ Grant² Williams³ Lawson⁴

48
- 0016931907
- Thin film deposition using low-energy ion beams. I. System specification and design
- (1976) Journal of Vacuum Science and Technology , vol.12 , pp. 591
- Amano¹ Bryce² Lawson³

49
- 0038129189
- Thin-film deposition using low-energy ion beams (4) Ion source modification
- (1978) Journal of Vacuum Science and Technology , vol.15 , pp. 118
- Amano¹ Bryce² Lawson³

50
- 84914183569
- Grenoble, 1977, Société Française du Vide, Paris
- (1977) Proc. 3rd Int. Congr. on Surface Chemistry , pp. 136
- Thomas¹ de Kluizenaar²

51
- 0017556522
- (1977) J. Appl. Phys. , vol.48 , pp. 4770
- Tsukizoe¹ Nakai² Ohmae³

52
- 84914253846
- Tokyo, 1977, Institute of Electrical Engineers of Japan, Tokyo
- (1977) Proc. 1st Symp. on Ion Sources and Applied Technology , pp. 103
- Miyake¹ Yagi² Tokuyama³

53
- 0017456426
- (1977) J. Appl. Phys. , vol.16 , pp. 245
- Yagi¹ Tamura² Tokuyama³

54
- 84914202250
- Proc. Int. Conf. on Low Energy Ion Beams, Salford, 1977
- (1978) Int. Phys. Conf. Ser. 38 , pp. 78
- Miyake¹ Yagi² Tokuyama³

55
- 84914248208
- Proc. Int. Conf. on Low Energy Ion Beams, Salford, 1977
- (1978) Inst. Phys. Conf. Ser. 38 , pp. 136
- Miyake¹ Yagi² Tokuyama³

56
- 84914188187
- Boulder, CO, IEEE, New York
- (1971) Proc. 11th Symp. on Electron, Ion and Laser Beam Technology , pp. 323
- Shepherd¹

57
- 0002703363
- Vienna, 1972, Österreichische Studien-Gesellschaft für Atomenergie, Vienna
- (1972) Proc. 2nd Int. Conf. on Ion Sources , pp. 790
- Takagi¹ Yamada² Kunori³ Kobiyama⁴

58
- 0016569820
- Ionized-cluster beam deposition
- (1976) Journal of Vacuum Science and Technology , vol.12 , pp. 1128
- Takagi¹ Yamada² Sasaki³

59
- 0017243401
- (1976) Thin Solid Films , vol.39 , pp. 207
- Takagi¹ Yamada² Sasaki³

60
- 84914188186
- Washington, DC, 1976, IEEE, New York
- (1976) Tech. Dig. Int. Electron Devices Meet. , pp. 605
- Takagi¹ Yamada² Sasaki³

61
- 0005944940
- (1977) Thin Solid Films , vol.45 , pp. 569
- Takagi¹ Yamada² Sasaki³

62
- 84914318777
- Edinburgh, 1977, CEP Consultants, Edinburgh
- (1977) Proc. Conf. on Ion Plating and Allied Techniques, IPAT 77 , pp. 50
- Takagi¹ Yamada² Sasaki³

63
- 0017731869
- Vienna, 1977, Berger, Vienna
- (1977) Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. on Solid Surfaces , pp. 1915
- Takagi¹ Yamada² Sasaki³ Itoh⁴ Ozawa⁵ Kodama⁶ Tominaga⁷ Hattori⁸

64
- 0017731869
- Vienna, 1977, Berger, Vienna
- (1977) Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. on Solid Surfaces , pp. 1915
- Takagi¹ Yamada² Sasaki³

65
- 84913850712
- Proc. Int. Conf. on Low Energy Ion Beams, Salford, 1977
- (1978) Inst. Phys. Conf. Ser. 38 , pp. 142
- Takagi¹ Yamada² Sasaki³

66
- 0002493223
- (1978) J. Cryst. Growth , vol.45 , pp. 326
- Yamada¹ Matsubara² Kodama³ Ozawa⁴ Takagi⁵

67
- 0017976868
- (1978) IEE Trans. Solid State Electron Devices , vol.2 , pp. S40
- Takagi¹ Yamada² Sasaki³

68
- 0018207009
- Proc. 4th Int. Thin Films Congr.
- Loughborough, 1978
- (1979) Thin Solid Films , vol.58 , pp. 9
- Takagi¹ Yamada² Matsubara³

69
- 0019077498
- (1980) J. Appl. Phys. , vol.51 , pp. 5419
- Takagi¹ Matsubara² Takaoka³

70
- 0343853981
- Crystalline and Electrical Characteristics of Silicon Films Deposited by Ionized-Cluster-Beams
- (1980) Japanese Journal of Applied Physics , vol.19 , pp. L181
- Yamada¹ Saris² Takagi³ Matsubara⁴ Takaoka⁵ Ishiyama⁶

71
- 0010053293
- (1977) J. Cryst. Growth , vol.37 , pp. 317
- Theeten¹ Madar² Mircea-Roussel³ Rocher⁴ Laurence⁵

72
- 49349123740
- (1978) J. Cryst. Growth , vol.45 , pp. 334
- Morimoto¹ Watanabe² Itoh³

73
- 49349126006
- (1978) J. Cryst. Growth , vol.45 , pp. 332
- Kuiper¹ Thomas² Shouter³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.