Optical techniques for on-line measurement of surface topography

Precision Engineering

Volumn 3, Issue 2, 1981, Pages 61-83

  Vorburger, T V ^b   Teague, E C ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

NONDESTRUCTIVE EXAMINATION;

SURFACES;

EID: 0019552551     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(81)90038-6     Document Type: Article

References (210)

1. Why Precision?
2. Trends in Measurement
3. Frontiers in Microtechnology
4. Micromechanics A Cinderella Subject
5. Delphi-Type Forecast of the Future of Production Engineering
6. In-Process and On-line Measurement of Surface Finish
7. Recent American and International Development in the Assessment of Surface Quality and Their Effects on the Future
8. Application of Inductive Heads for Non-Contact Measurement of Surface Finish
9. Evaluation, Revision, and Application of the NBS Stylus/Computer System for the Measurement of Surface Roughness
10. FAST Facility Available for Engineering Needs
11. Stylus techniques
12. New Developments in Surface Characterization and Measurements by Means of Random Process Analysis
13. Measurement of the Statistical Microgeometry Of Engineering Surfaces
14. Surface — a Link Between Manufacture and Function
15. An Investigation of the Shape and Dimensions of Some Diamond Styli
16. Measurements of Stylus Radii
17. The Shape of Solid Surfaces
18. Some Applications of Statistical Surface Measurements to Engineering Problems
19. Precision Measurement in Thin Film Optics
20. Eight Techniques for the Optical Measurement of Measurement of Surface Roughness
21. Optical Estimation of Statistics of Surface Roughness from Light Scattering Measurements
22. Scattering from Optical Surfaces
23. On the Specular Reflection from Rough Surfaces
24. Relation between Surface Roughness and Specular Reflectance at Normal Incidence
25. Specular Reflectance of Aluminized Ground Glass and the Height Distribution of Surface Irregularities
26. Relation between the Height Distribution of a Rough Surface and Reflectance at Normal Incidence
27. Measurement of Smooth Surface Finishes
28. Gloss Meter for Surface Evaluation
29. Surface Studies with a Gloss Meter
30. A Study of the Surface Parameters of Ground and Lapped Metal Surfaces
31. The Use of Laser Light in the Study of Metal Surfaces
32. A Comparison of Talysurf 10 and Optical Measurements of Roughness and Surface Slope
33. Exploratory Investigation of Laser Methods for Grinding Research
34. Light Scattering from fused Polycrystalline Aluminum Oxide Surfaces
35. Measurement of Surface Roughness with a Laser Beam
36. In-Process Indication of Surface Roughness Using a Fibre-Optics Transducer
37. Surface Roughness Determination by the Measurement of Reflectance
38. Measurement of the Correlation between the Specular Reflectance and Surface Roughness of Ag Films
39. A Look at Surface Finish
40. Optical and Mechanical RMS Surface Roughness Comparison
41. Comparison of the Beckman Model with Bidirectional Reflectance Measurements
42. Surface Roughness Measurements for Coherent Light Scattering
43. Review of Geometric Attributes of Appearance
44. Study of Aluminium Films I. Optical Studies of Reflectance Drops and Surface Oscillations on Controlled-Roughness Films
45. Surface and Optical Studies of Diamond Turned and Other Metal Mirrors
46. Scattering Characteristics of Optical Materials
47. Scattering from infrared Missile Domes
48. Structure-Related Optical Characteristics of Thin Metallic Films in the Visible and Ultraviolet
49. Standards for Optical Surface Quality Using Total Integrated Scattering
50. A Simple Scatter Method for Optical surface Roughness and Slope Measurements of Polished Fused Silica
51. 2 Laser Optics
52. Diamond Turning and Polishing of Infrared Optical Components
53. Low-Scatter, Low-Loss Mirrors for Laser Gyros
54. Scattering and Surface Finish of Unconventional Mirror Materials
55. Streulicht Messungen an Polierten Glasoberflachen
56. Messung des Mitterauhwertes Zylindrischer Teile Während des Schleifens
57. Surface Finish from Reflected Laser Light
58. In-Process Detection of Surface Roughness in Machining
59. Roughness Measurement with a Laser Scanning Analyzer
60. Roughness Measurement by Light Scattering
61. Roughness Characterization of Smooth Machined Surfaces by Light Scattering
62. Spectral Density Function Gives Surface Roughness
63. Measurement of the Finish of Diamond-Turned Metal Surfaces by Differential Light Scattering
64. Relationship between Surface Scattering and Micro-topographic Features
65. The Measurement of Surface Texture and Topography by Differential Light Scattering
66. Relation between the Angular Dependence of Scattering and the Statistical Properties of Optical Surfaces
67. Light Scattering from Multilayer Optics: Comparison of Theory and Experiment
68. Laser Heterodyne Apparatus for Roughness Measurements of Polished Surfaces
69. Analysis and Prediction of Laser Scattering from Rough-Surface Materials
70. Instrument for Measuring the Roughess of Supersmooth Surfaces
71. Determination of Surface Roughness From Light Scattering Measurements
72. Light Scattering as a Technique for Measuring the Roughnes of Optical Surfaces
73. Effects of Roughness of Metal Surfaces on Angular Distribution of Monochromatic Reflected Radiation
74. 064 μm Scatter Measurements from Teflon and Various Metallic Surfaces
75. The Direct Measurement of the Power Spectrum of Rough Surfaces by Optical Fourier Transformation
76. Power Spectra of Rough Surfaces Obtained by Optical Fourier Transformation
77. Determination of the Autocorrelation Function of Height on a Rough Surface from Coherent Light Scattering
78. Bidirectional Reflectance of a Randomly Rough Surface
79. Surface Roughness Effects on Bidirectional Reflectance
80. Bidirectional Reflectance Measurements for One-Dimensional Randomly Rough Surfaces
81. Residual Surface Roughness of Diamond-Turned Optics
82. Automatic Inspection of Cylinder Bores
83. Optical Inspection of Cylinder Bores
84. Measurement of the Thickness and Refractive Index of Very Thin Films and the Optical Properties of Surfaces by Ellipsometry
85. Determination of the Properties of Films on Silicon by the Method of Ellipsometry
86. Ellipsometry in Corrosion Testing
87. Characterization of Real Surfaces by Ellipsometry
88. Ellipsometric Study of 40eV Ion Damage in Silicon
89. Characterization of Defects in Real Surfaces by Ellipsometry
90. Ellipsometry Determination of Optical Anisotropy of Gallium Arsenide
91. Design and Operation of an Automated High Temperature Ellipsometer
92. Ellipsometric Study of Polished Glass Surfaces
93. Determination of Small Dilatations and Surface Stress by Birefringence Measurements
94. Measurement of Smooth Surface Roughness by Means of a Photometric Method
95. A New Sensor of Surface Roughness for Process Control System
96. Testing a New Optical Sensor for In-Process Detection of Surface Roughness
97. Effect of Surface Roughness on Ellipsometry of Aluminum
98. Interpretation of Ellipsometric Data for Transparent Films on Rough Metal Surfaces
99. Ellipsometry of Rough Surfaces
100. Errors Arising from Surface Roughness in Ellipsometric Measurement of the Refractive Index of a Surface
101. Ellipsometric Parameters of Rough Surfaces and of a System Substrate-Thin Film with Rough Boundaries
102. Rough Silicon Surfaces Studied by Optical Methods
103. Effects of Surface Microroughness in Ellipsometry
104. Polarization Characteristics of Scattered Radiation From a Diffraction Grating by Ellipsometry with Application to Surface Roughness
105. Investigation of Effective Medium Models of Microscopic Surface Roughness by Spectroscopic Ellipsometry
106. Present Status of Automatic Ellipsometers
107. The Statistics of Speckle Patterns
108. Speckle in Optics
109. Measurement of Some Second-Order Statistical Properties of Speckle
110. A Contrast Variation of Image Speckle Intensity under Illumination of Partially Coherent Light
111. Measurement of Surface Roughness Properties by Using Image Speckle Contrast
112. The Statistics of Speckle Patterns
113. The Statistics of Speckle Patterns
114. Statistical Properties of Laser Speckle Patterns
115. Speckle Pattern in Partially Coherent Light
116. Space and Wavelength Dependence of speckle Intensity
117. Theory of Speckle Dependence on Surface Roughness
118. Surface Roughness Measurement Using White Light Speckle
119. The Scattering of Polychromatic Light from Rough Surfaces-First Order Statistics
120. Contrast Dependence of White Light Image Speckles on Surface Roughness
121. Utilization des franzes d'interference en lumière diffuse pour l'étude de l'état de surface d'un diffuseur
122. Correlation entre deux speckles obtenus avec deux longeuers de l'onde — application à la mesure de la rugosite moyenne
123. Optical Surface Roughness Determination Using Speckle Correlation Techniques
124. Surface Roughness Measurement Using Dichromatic Speckle Pattern: An Experimental Study
125. Surface Roughness by Means of Speckle Wavelength Decorrelation
126. De-Correlation Effects in Speckle-Pattern Interferometry
127. Real-Time Measurement of Surface Roughness by Correlation of Speckle Patterns
128. Some Effects of Surface Roughness on the Appearance of Speckle in Polychromatic Light
129. Stanford Electronics
130. Multiple-Beam Fringes of Equal Chromatic Order Part VI Methods of Measuring Roughness
131. Interferometers
132. Measurement of the RMS Roughness, Autocovariance Function and Other Statistical Properties of Optical Surfaces Using a FECO Scanning Interferometer
133. Smoothness and Thermal Stability of Cer-Vit Optical Material
134. Measurement of Ultrafine Surface Finishes
135. Resolution Limits in Multiple-Beam Interferometry
136. An Optical Profilometer
137. Heterodyne Profilometer for Measuring Surface Microstructure
138. Proposed Interferometric Method of Measurement of Roughness and Autocorrelation Function in Smooth-Finished Surfaces
139. Interferometric Surface Roughness Measurements
140. Surface Roughness Measurement by Holographic Interferometry
141. Surface Roughness Measurement by Two Wavelength Holographic Interferometry
142. Rough Surface Interferometry at 10.6 μm
143. Optical Profile Transducer
144. New Noncontact Devices for Measuring Small Microdisplacements
145. Use of a Microscope as a Non-contacting Microdisplacement Device
146. A Non-Contacting Length Comparator with 10 Nanometer Precision
147. Fast Versatile Optical Profilometer
148. Development an In-Process Sensor for Surface Roughness by a Laser Beam
149. Frequency Characteristic of Cutting Process Identified by an In-Process Measurement of Surface Roughness
150. Two Dimensional Measurement of Surface Roughness by the Light Sectioning Method
151. Noncontact Optical Profilometer
152. Holographic Behaviour of Channelled Spectra in Space and Time Optics
153. Space and Time Variables in Optics and Holography: Recent Experimental Aspects
154. Space-Time Optics in Shape and Surface Metrology
155. Use of Optical Data Processing Techniques for Surface Roughness Studies
156. Additional Optical Data Processing Techniques for Surface Roughness Studies
157. Die Kohärenz-optische Messung der Rauhtiefe vor metallischen Oberflachen
158. Reconstruction of Surface Profiles from Their Diffraction Spectra
159. Modern Methods of Assessing the Quality and Function of Surface Texture
160. Optical and Photoelectric Properties of Mg in the Vacuum Ultraviolet
161. On the Quantitative Measurement of the Roughness Spectrum of Silver Films
162. Determination of the Surface-Finish Parameters by Means of the Total Internal Reflection Method
163. Performance Characteristics of Single Point Diamond Machined Metal Mirrors for Infrared Laser Applications
164. Reflectometric Methods of Surface Roughness Measurement
165. Some Measurements of the Angular Distribution and Polarization of Surface Plasmon Radiation from Ag Films
166. Optical Instruments for Surface Roughness Measurements
167. Theoretical Determination of the Reflection Curves and Introduction of a New Method for Measuring Surface Gloss
168. Light Scattering Experiments on Silver Films of Different Roughness Using Surface Plasmon Excitation
169. Influence of Surface Roughness on the Reflection of Gold Films in the Region of Surface Plasmon Excitation
170. Surface Roughness Measurements by Photometric Method
171. Initial Phase in the Development of an Automatic, Optical Scatter Inspection Station
172. A Laser Method of Determining the Surface Finish
173. ffects of Surface Roughness on Surface Polaritons
174. Preliminary Evaluation of a Proximity Transducer for the Measurement of Surface Texture
175. Assessment of Surface Roughness by X-Ray Scattering and Differential Interference Contrast Microscopy
176. The Role of Surface Topography in X-Ray Scattering
177. Effects of Scattering on X-Ray Imaging
178. Surface Roughness Measurement with an Optical Fourier Spectrum Analyzer
179. Refection of Electromagnetic Waves from Slightly Rough Surfaces
180. The Reflection of Electromagnetic Waves from a Rough Surface
181. Rough Surface Scattering Based on the Specular Point Theory
182. Bidirectional Reflectance of Rough Metal Surfaces
183. The Effective Reflection Coefficients in Forward Scatter from a Dielectric Slightly Rough Surface
184. Scattering of Light by Slightly Rough Surfaces or Thin Films Including Plasma Resonance Emission
185. Study of Rough Surfaces by Light Scattering
186. A Reformulation of Some Results of P. Beckmann for Scattering from Rough Surfaces
187. Etude par Diffusion Lumineuse de la Nature des Surfaces de Verre Poli
188. Interaction of Electromagnetic Waves at Rough Dielectric Surfaces
189. Optical Properties of Rough Surfaces: General Theory and the Small Roughness Limit
190. Incoherent Backscatter from Rough Surfaces: The Two-Scale Model Reexamined
191. Explanation of the Experimental Results of Light Backscattered from a Very Rough Surface
192. Scalar Scattering Theory for Multilayer Optical Coatings
193. Vector Scattering Theory
194. Expression for the Reflectance of Randomly Rough Surfaces Derived with the Fresnel Approximation
195. Multiple Scattering of Waves from Random Rough Surfaces