GROWTH OF SILICON FROM SILANE IN COLD WALL CVD SYSTEMS.

Philips Journal of Research

Volumn 36, Issue 2, 1981, Pages 122-137

  Claassen, W A P ^a   Bloem, J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

SILICON COMPOUNDS;

SILANE;

SEMICONDUCTING SILICON;

EID: 0019549751     PISSN: 01655817     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)